
Materials Tester
Nano- and micromechanical characterization of surfaces plays a decisive role in many issues of triboanalysis for thin films, coatings, MEMS, NEMS, semiconductor wafers and devices, systems of data storage, biomedical components, polymers, elastomers, metals and alloys, ceramics, etc.
Nanoindentation Module NH-3With the progress of nanotechnology and development of thin films (solar cells, CVD, PVD, DLC, MEMS, etc. nanomechanical tests have become standard. They improve on the traditional tests by being done at low loads and shallow depths with very sharp tips, high spatial resolution, and in-situ precise load-displacement data. Nanoindentation – single/multiple indents per the ISO 14577 to measure hardness, Young’s modulus, tensile and von Mises stresses, contact stiffness, etc. of thin films, thick coatings and bulk materials. Nanoscratch at constant, increasable and user-defined programmable load to evaluate scratch-hardness and scratch-adhesion of thin films, thick coatings and bulk materials. Dynamic indentation (with vibrating tip) to measure depth-dependant loss and storage moduli. |
Micromodule MH-2Micromechanical tests have been used to measure mechanical properties of coatings or bulk materials. Instrumented micromechanical test improves on the traditional ones by providing in-situ load-displacement data and by using advanced signals, like acoustic emission, ECR, friction, etc. for more comprehensive characterization. Instrumented microindentation – per the ISO 14577 on macroscale (for loads greater than 2 N) to calculate hardness, Young’s modulus, tensile and von Mises stresses, contact stiffness, etc. of coatings and bulk materials. Traditional Vickers and Knoop microhardness per the ASTM E384-99. Microscratch at constant, increasable and user-defined programmable load to evaluate scratch-hardness and scratch-adhesion of coatings. |
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Features of NH-3:
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Features of MH-2:
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Nanotribology Options
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Advanced in-situ SensorsAE - The high-frequency acoustic emission sensor detects the crack initiation and propagation in the hard and metallic coatings. COF - When the coating breaks or when the indenter digs deep in the coating the friction changes. Coefficient of friction (static and dynamic) is automatically calculated. ECR - The electrical contact resistance changes as a conductive tip digs deeper into the coating. |
In-line ImagingAdvanced in-situ and in - lineimaging options. The images a regenerated automatically after the test without removing the sample from the tool. AFM-Scanning ranges from 50 x 50 x 3 μm up to 180 x 180 x 14 μm 3D profilometer-Scanning ranges from 10 x 10 x 10 μm up to 500 x 500 x 500 μm. High Magnification Microscope - With revolving head and multiple objectives. Medium Magnification Microscope - For in-situ imaging and precise positioning; both top and side views. |
Instrument Highlights
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Three Head Positions
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Standards
and many more |

Nano+Micro Technical Specifications
| Parameter | Nano (NH-3) | Micro (MH-2) |
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Load Range - Resolution Friction Range - Resolution Depth Range - Resolution XY Stage Range - Resolution Optical Microscope Scratch Speed - Length - Depth |
up to 500 mN 0.03 μN up to100 mN 3 μN 200 μm 0.02 nm 120 x 120 mm 0.1 μm from 10x to 2500x 1 μm/s to 10 mm/s 1 μm to 100 mm 1 nm to 200 μm |
up to 20 N 0.1 mN up to 10 N 0.2 mN 500 μm 0.1 nm 120 x 120 mm 0.1 μm from 10x to 2500x 1 μm/s to 10 mm/s 1 μm to 100 mm 10 nm to 500 μm |
Atomic Force Microscope (AFM) Module
Nano-Imaging |
Nano-Measurements |
Nano-Mapping |
Topography |
Nano-Roughness |
Lateral Nano-Friction |
Magnetic Properties |
Wear / Scratch / Indent |
Pull-Up Nano-Adhesion |
Applications
- Nano-imaging in mechanical and tribological testing without sample removal:
- comparison of surface topography before / after and periodically during tests
- periodic nano-imaging (AFM) and continuous micro-imaging ( OM ) of wear, scratch, crack, indent development, growth and propagation
- lateral and adhesion mapping of test surface before / after and periodically during tests
- Force measurements in mechanical and tribological testing without sample removal:
- comparison of AFM nano-friction and UMT micro / macro - friction on surfaces
- comparison of AFM nano-adhesion and UMT micro / macro - adhesion on surfaces
Nano Defectoscopy
- auto-positioning on surface defects with known coordinates (X&Y or R&Θ), easily downloadable from optical or stylus macro-characterization instruments
- rotary or linear sample table with sub-micron positioning resolution
- failure analysis and quality control on samples up to 6”, optional 8”:
- optical displays (LCD, LED, Plasma)
- optical discs (DVD, CD, PD)
- magnetic discs and head wafers
- semiconductor and MEMS wafers
Technical Highlights
- Commercial advanced atomic force microscope (AFM)
Functions:- atomic force microscopy
- phase imaging
- magnetic force microscopy
- lateral force mapping
- adhesion force mapping
- contact and semi/non-contact
- 50×50x3 µm
- 100×100x9 µm
- 180×180x14 µm
- Digital high-resolution wide-field-of-view optical microscope (OM) and a color CCD camera
- continuous video
- still micro-images
- micro-positioning of AFM tip
- Full mechanical and electrical integration into UNMT
Micro-Scratch Module
is destined for quantitative coating adhesion, scratch-resistance and scratch-hardness investigations and performs the following tests:- scratch-resistance
- scratch-adhesion
- scratch-hardness
- scratch-toughness.
Technical Highlights
- Loading system: uniquely precise active-feedback servo-control for normal force, maintained either constant or increasing (in steps or gradually)
- Scratch tools:
- Rockwell and Vickers indenters
- Diamond stylus 2-200 µm
- Tungsten carbide, sapphire, steel balls 1.5-25 mm
- Steel needles 0.1-1 mm
- Patented micro-blades 0.4-1.0 mm
- Maximum normal load: 200N
- Normal load minimum resolution: 1µN
- Multiple sensors:
- Acoustic emission: high frequency up to 5.5MHz
- Friction coefficient
- Electrical contact or surface resistance: mOhms to MOhms
- Capacitance for depth monitoring
- Digital optical microscope for micro-imaging: 550x
- CCD Camera: video and still images
- Atomic force microscope for nano-imaging: contact and semi/non-contact modes
- Sample shapes: any, including irregular

- Sample sizes: from microns up to 150 mm
- Sample stages: linear or rotary
- Position resolution: < 1µ
- Multi-scratch: automatic mode
Applications

Wear-resistant coatings
TiN, TiC, DLC, WC
Cutting tools
Semiconductors
Low K materials
Interconnects
Passivation layers
Biomedical
Tablets and pills
Implants and Tissues
Thin films
CVD/PVD coatings
Solar cells, MEMS, fuel cells
Optical components
Window Glass
Lenses
Optical coatings
Decorative coatings
Hard disk industry
Disk and head overcoats
DLC coatings
Automotive & Aerospace
Paints and intermediate layers
Windows
Engine components
Related Technical Papers
- Integrierte SPM für Nano-Tribologische Charakterisierung von Oberflächen, Tribologie + Schmierungstechnik, Nr. 1, 2007
- Tribomechanische Charakterisierung von Hartstoff-Beschichtungen im Nano- und Mikrotester, Tribologie + Schmierungstechnik, Nr. 6, 2008


